Xiaojing Shi
at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Sensors, Silicon, Resonators, 3D modeling, Optical simulations, Wet etching, Device simulation, Boron, Electrodes, Environmental sensing

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Sensors, Silicon, Electrodes, Boron, Resonators, Signal to noise ratio, Finite element methods, Sensor performance, Packaging, Microelectromechanical systems

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