Dr. Xiaoli Zhu
Associate professor at Institute of Microelectronics, Cas
SPIE Involvement:
Author
Publications (11)

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Electron beam lithography, X-rays, Diffraction, Spectroscopy, Diffraction gratings, Lithography, X-ray lithography, X-ray diffraction, Gold

SPIE Journal Paper | August 19, 2017
JM3 Vol. 16 Issue 03
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

SPIE Journal Paper | March 5, 2013
OE Vol. 52 Issue 03
KEYWORDS: X-rays, X-ray lithography, Gold, Silicon carbide, X-ray diffraction, Electron beam lithography, X-ray optics, Laser welding, Diffraction gratings, Lithography

PROCEEDINGS ARTICLE | January 12, 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

SPIE Journal Paper | May 1, 2008
OE Vol. 47 Issue 05
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

PROCEEDINGS ARTICLE | January 15, 2008
Proc. SPIE. 6832, Holography and Diffractive Optics III
KEYWORDS: Diffraction, Zone plates, X-rays, Near field diffraction, X-ray diffraction, Computer simulations, X-ray astronomy, X-ray lithography, X-ray technology, Synchrotron x-ray imaging

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top