Dr. Xiaoli Zhu Profile

Dr. Xiaoli Zhu

Associate professor at Institute of Microelectronics, Cas

SPIE Involvement:

Author

Publications (11)

Proceedings Article | 23 August 2017 Presentation + Paper

Nanofabrication of free-standing spectroscopic photon sieves operating in soft x-ray region

Xiaoli Zhu, Lai Wei, Hailiang Li, Leifeng Cao, Changqing Xie

Proceedings Volume 10386, 103860Q (2017) https://doi.org/10.1117/12.2272803

KEYWORDS: Electron beam lithography, X-rays, Diffraction, Spectroscopy, Diffraction gratings, Lithography, X-ray lithography, X-ray diffraction, Gold

Read Abstract +

SPIE Journal Paper | 19 August 2017

Nanofabrication and characterization of high-line-density x-ray transmission gratings

Xiaoli Zhu, Hailiang Li, Leifeng Cao, Shenye Liu, Peixiong Shi, Changqing Xie

JM3, Vol. 16, Issue 03, 034503, (August 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.3.034503

KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

Read Abstract +

SPIE Journal Paper | 5 March 2013

Fabrication of x-ray diffractive optical elements for laser fusion applications

Changqing Xie, Xiaoli Zhu, Hailiang Li, Jiebin Niu, Yilei Hua, Lina Shi

OE, Vol. 52, Issue 03, 033402, (March 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.3.033402

KEYWORDS: X-rays, X-ray lithography, Gold, Silicon carbide, X-ray diffraction, Electron beam lithography, X-ray optics, Laser welding, Diffraction gratings, Lithography

Read Abstract +

Proceedings Article | 12 January 2009 Paper

Fabrication of transmission gratings for extreme ultraviolet interference lithography

Jie Ma, Xiaoli Zhu, Weizhong Zhu, Changqing Xie, Tianchun Ye, Peixiong Shi

Proceedings Volume 7133, 713336 (2009) https://doi.org/10.1117/12.810640

Read Abstract +

SPIE Journal Paper | 1 May 2008

Design, fabrication, and test of soft x-ray sinusoidal transmission grating

Min Zhao, Xiaoli Zhu, Baoqin Chen, Changqing Xie, Min Liu, Jiebing Niu, Longyu Kuang, Leifeng Cao

OE, Vol. 47, Issue 05, 058001, (May 2008) https://doi.org/10.1117/12.10.1117/1.2919717

KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Read Abstract +

Proceedings Article | 15 January 2008 Paper

Near-field diffraction analysis and simulation about nanoscale of Fresnel zone plate

Ji Jang, Changqing Xie, Xiping Xu, Xiaoli Zhu, Ming Liu

Proceedings Volume 6832, 68321S (2008) https://doi.org/10.1117/12.755092

KEYWORDS: Diffraction, Zone plates, X-rays, Near field diffraction, X-ray diffraction, Computer simulations, X-ray astronomy, X-ray lithography, X-ray technology, Synchrotron x-ray imaging

Read Abstract +

Proceedings Article | 4 January 2008 Paper

Fabrication of 200 nm period x-ray transmission gratings using electron beam lithography

Xiaoli Zhu, Changqing Xie, Tianchun Ye, Min Zhao, Jie Ma, Ji Jiang, Jiebin Niu, Ming Liu

Proceedings Volume 6832, 68320V (2008) https://doi.org/10.1117/12.758100

KEYWORDS: X-ray lithography, X-rays, Electron beam lithography, Gold, Electroplating, Polymethylmethacrylate, Photomasks, Silicon, X-ray telescopes, Photoresist processing

Read Abstract +

Proceedings Article | 21 November 2007 Paper

Analysis of property of HSQ in electron beam lithography

Min Zhao, XiaoLi Zhu, Baoqin Chen, Jiebin Niu, Ming Liu, Changqing Xie

Proceedings Volume 6827, 682728 (2007) https://doi.org/10.1117/12.757739

KEYWORDS: Electron beam lithography, Silicon, Electron beams, Chemical species, Hydrogen, Backscatter, Nanoimprint lithography, Lithography, Nanolithography, Nanostructures

Read Abstract +

Proceedings Article | 21 November 2007 Paper

Analysis of the resolution doubling technique of high-resolution gratings by x-ray lithography

Jie Ma, Xiaoli Zhu, Changqing Xie, Ming Liu, Min Zhao, Ji Jiang

Proceedings Volume 6827, 68272A (2007) https://doi.org/10.1117/12.757819

KEYWORDS: Photomasks, X-ray lithography, Semiconducting wafers, X-rays, Gold, Beam propagation method, Optical design, Wave propagation, Light wave propagation, Lithography

Read Abstract +

Proceedings Article | 21 November 2007 Paper

Fabrication of quantum dot array diffraction grating for soft x-ray spectroscopy

Min Zhao, XiaoLi Zhu, Baoqin Chen, ChangQing Xie, Ming Liu, Leifeng Cao

Proceedings Volume 6724, 67241O (2007) https://doi.org/10.1117/12.782916

KEYWORDS: X-rays, Spectroscopy, Diffraction, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, Photomasks, Electron beams, Silicon

Read Abstract +

Proceedings Article | 14 November 2007 Paper

Fabrication of x-ray diffractive optical elements for ICF target diagnosis

Xiaoli Zhu, Deqiang Wang, Changqing Xie, Leifeng Cao, Jiamin Yang, Tianchun Ye, Jiebin Niu, Baoqin Chen, Ming Liu

Proceedings Volume 6722, 672208 (2007) https://doi.org/10.1117/12.782678

KEYWORDS: X-rays, Electron beam lithography, Diffractive optical elements, Electroplating, Gold, Photomasks, X-ray diffraction, X-ray lithography, Silicon, X-ray optics

Read Abstract +

Showing 5 of 11 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years