Dr. Xiaoli Zhu
Associate professor at Institute of Microelectronics, Cas
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 23 August 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Gold, Lithography, Electron beam lithography, Diffraction, Spectroscopy, X-rays, X-ray diffraction, X-ray lithography, Diffraction gratings

SPIE Journal Paper | 19 August 2017
JM3 Vol. 16 Issue 03
KEYWORDS: X-rays, Electron beam lithography, X-ray diffraction, X-ray lithography, Gold, X-ray characterization, Nanofabrication, Diffraction gratings, Photomasks, Diffraction

SPIE Journal Paper | 5 March 2013
OE Vol. 52 Issue 03
KEYWORDS: X-rays, X-ray lithography, Gold, Silicon carbide, X-ray diffraction, Electron beam lithography, X-ray optics, Laser welding, Diffraction gratings, Lithography

Proceedings Article | 12 January 2009
Proc. SPIE. 7133, Fifth International Symposium on Instrumentation Science and Technology

SPIE Journal Paper | 1 May 2008
OE Vol. 47 Issue 05
KEYWORDS: X-ray lithography, X-rays, Diffraction gratings, Diffraction, Lithography, Photomasks, Gold, X-ray diffraction, Spectroscopy, Spectrographs

Showing 5 of 11 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top