Dr. Xiaolin Liu
at Beijing Institute of Space Mechanics & Electricity
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | February 28, 2017
Proc. SPIE. 10256, Second International Conference on Photonics and Optical Engineering

PROCEEDINGS ARTICLE | November 5, 2015
Proc. SPIE. 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
KEYWORDS: Optical components, Optical design, Polishing, Error analysis, Wavefronts, Wavefront aberrations, Control systems, Code v, Optics manufacturing, Surface finishing

PROCEEDINGS ARTICLE | August 5, 2015
Proc. SPIE. 9618, 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
KEYWORDS: Optical components, Lithography, Optical design, Polarization, Birefringence, Optical coatings, Control systems, Process control, Projection systems, Polarization control

SPIE Journal Paper | May 7, 2015
OE Vol. 54 Issue 05
KEYWORDS: Optical components, Lithography, Optics manufacturing, Combined lens-mirror systems, Lithium, Error analysis, Optical systems, Reflectivity, Mirrors, Refractor telescopes

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9277, Nanophotonics and Micro/Nano Optics II
KEYWORDS: Lithography, 3D acquisition, Lithographic illumination, Cadmium, Polarization, Image processing, Error analysis, Projection systems, Immersion lithography, Critical dimension metrology

PROCEEDINGS ARTICLE | August 21, 2014
Proc. SPIE. 9283, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Lithographic illumination, Cadmium, Polarization, Birefringence, Crystals, Projection systems, Immersion lithography, Critical dimension metrology, Protactinium

Showing 5 of 9 publications
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