Dr. Xiaolin Liu Profile

Dr. Xiaolin Liu

at Beijing Institute of Space Mechanics & Electricity

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Author

Publications (14)

Proceedings Article | 18 December 2023 Paper

Analysis of the key techniques in polarization feature extraction and correction

Chengguang Cui, Xiaohong Zhang, Xiaolin Liu, Mengxu Li, Shengjie Zhang

Proceedings Volume 12962, 1296207 (2023) https://doi.org/10.1117/12.3005397

KEYWORDS: Polarization, Equipment, Calibration, Remote sensing, Polarized light, Sensors, Ocean optics, Incident light, Target detection, Polarization imaging

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Proceedings Article | 6 November 2023 Paper

Polarization analysis and experiment research of optical remote sensor

Xiaolin Liu, Yin Huang, Chengguang Cui, Zhen Cao, Xiaohong Zhang, Pengmei Xu

Proceedings Volume 12921, 129215I (2023) https://doi.org/10.1117/12.2692498

KEYWORDS: Polarization, Pupil aberrations, Design and modelling, Matrices, Sensors, Attenuation, Signal attenuation, Ray tracing, Polarized light, Ocean optics

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Proceedings Article | 27 March 2022 Paper

Measurement and analysis of polarization quantitative error for grating spectrometer

Chengguang Cui, Xiaolin Lin, Hefei Liu, Ling Li, Chao Zhang

Proceedings Volume 12169, 12169B1 (2022) https://doi.org/10.1117/12.2626421

KEYWORDS: Polarization, Spectroscopy, Error analysis, Quantization, Calibration, Remote sensing

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Proceedings Article | 24 November 2021 Paper

Polarization analysis and control of a coastal zone imaging optics

Xiaolin Liu, Tuotuo Li, Xiaohong Zhang, Pengmei Xu, Chengguang Cui

Proceedings Volume 12069, 120690A (2021) https://doi.org/10.1117/12.2605085

KEYWORDS: Polarization, Coating, Ocean optics, Polarization control, Optical design, Ray tracing, Remote sensing

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Proceedings Article | 31 January 2020 Paper

Stray light suppression of ocean camera

Ke Li, Xiaolin Liu, Tuotuo Li, Bei Chu

Proceedings Volume 11427, 114271K (2020) https://doi.org/10.1117/12.2551604

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Proceedings Article | 28 February 2017 Paper

Global optimization method based on ray tracing to achieve optimum figure error compensation

Xiaolin Liu, Xuejia Guo, Tianjin Tang

Proceedings Volume 10256, 1025657 (2017) https://doi.org/10.1117/12.2260716

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Proceedings Article | 5 November 2015 Paper

Wavefront aberrations control for complex optical systems by compensation-surface

Xiaolin Liu, Yanqiu Li, Ke Liu

Proceedings Volume 9795, 97952L (2015) https://doi.org/10.1117/12.2218151

KEYWORDS: Optics manufacturing, Error analysis, Optical components, Surface finishing, Polishing, Optical design, Code v, Wavefront aberrations, Control systems, Wavefronts

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Proceedings Article | 5 August 2015 Paper

Polarization aberration control for hyper-NA lithographic projection optics at design stage

Xiaolin Liu, Yanqiu Li, Ke Liu

Proceedings Volume 9618, 96180H (2015) https://doi.org/10.1117/12.2193245

KEYWORDS: Polarization, Lithography, Optical design, Control systems, Optical coatings, Birefringence, Optical components, Polarization control, Process control, Projection systems

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SPIE Journal Paper | 7 May 2015 Open Access

Clocking-optimization method for figure-error balancing in complex optical systems

Xiaolin Liu, Yanqiu Li, Ke Liu

OE, Vol. 54, Issue 05, 057103, (May 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.5.057103

KEYWORDS: Optical components, Lithography, Optics manufacturing, Combined lens-mirror systems, Lithium, Error analysis, Optical systems, Reflectivity, Mirrors, Refractor telescopes

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Proceedings Article | 13 November 2014 Paper

Polarization aberration compensation method by adjusting illumination partial coherent factors in immersion lithography

Yue Jia, Yanqiu Li, Lihui Liu, Chunying Han, Xiaolin Liu

Proceedings Volume 9277, 92770Z (2014) https://doi.org/10.1117/12.2087529

KEYWORDS: Polarization, 3D acquisition, Immersion lithography, Critical dimension metrology, Cadmium, Lithographic illumination, Lithography, Error analysis, Projection systems, Image processing

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Proceedings Article | 21 August 2014 Paper

A method for compensating the polarization aberration of projection optics in immersion lithography

Yue Jia, Yanqiu Li, Lihui Liu, Chunying Han, Xiaolin Liu

Proceedings Volume 9283, 928309 (2014) https://doi.org/10.1117/12.2069711

KEYWORDS: Cadmium, Crystals, Polarization, Lithography, Protactinium, Projection systems, Birefringence, Immersion lithography, Critical dimension metrology, Lithographic illumination

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SPIE Journal Paper | 10 March 2014

Automatic figure errors balancing method for catoptric and catadioptric lenses

Xiaolin Liu, Yanqiu Li, Ke Liu

OE, Vol. 53, Issue 03, 035101, (March 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.3.035101

KEYWORDS: Optical components, Error analysis, Combined lens-mirror systems, Reflector telescopes, Lenses, Mirrors, Geometrical optics, Optics manufacturing, Collimators, Reflectivity

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Proceedings Article | 31 December 2013 Paper

A technique for extracting and analyzing the polarization aberration of hyper-numerical aperture image optics

Yanqiu Li, Xuejia Guo, Xiaolin Liu, Lihui Liu

Proceedings Volume 9042, 904204 (2013) https://doi.org/10.1117/12.2038176

KEYWORDS: Protactinium, Polarization, Optical coatings, Birefringence, Optical design, Lithography, Apodization, Analytical research, Silica, Geometrical optics

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Proceedings Article | 16 October 2012 Paper

Illuminator design for small field ArF lithography system

Lidong Wei, Yanqiu Li, Ke Liu, Xiaolin Liu

Proceedings Volume 8416, 84160I (2012) https://doi.org/10.1117/12.978289

KEYWORDS: Fiber optic illuminators, Eye, Lithography, Reticles, Beam shaping, Excimer lasers, Spherical lenses, Lithographic illumination, 193nm lithography, Tolerancing

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Showing 5 of 14 publications

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