Dr. Xiaolin Liu
at Beijing Institute of Space Mechanics & Electricity
SPIE Involvement:
Publications (9)

Proceedings Article | 28 February 2017
Proc. SPIE. 10256, Second International Conference on Photonics and Optical Engineering

Proceedings Article | 5 November 2015
Proc. SPIE. 9795, Selected Papers of the Photoelectronic Technology Committee Conferences held June–July 2015
KEYWORDS: Optics manufacturing, Error analysis, Optical components, Surface finishing, Polishing, Optical design, Code v, Wavefront aberrations, Control systems, Wavefronts

Proceedings Article | 5 August 2015
Proc. SPIE. 9618, 2015 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
KEYWORDS: Polarization, Lithography, Optical design, Control systems, Optical coatings, Birefringence, Optical components, Polarization control, Process control, Projection systems

SPIE Journal Paper | 7 May 2015
OE Vol. 54 Issue 05
KEYWORDS: Optical components, Lithography, Optics manufacturing, Combined lens-mirror systems, Lithium, Error analysis, Optical systems, Reflectivity, Mirrors, Refractor telescopes

Proceedings Article | 13 November 2014
Proc. SPIE. 9277, Nanophotonics and Micro/Nano Optics II
KEYWORDS: Polarization, 3D acquisition, Immersion lithography, Critical dimension metrology, Cadmium, Lithographic illumination, Lithography, Error analysis, Projection systems, Image processing

Showing 5 of 9 publications
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