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Xiaoman Zhang
at China Jiliang Univ
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Author
Publications (1)
Proceedings Article | 28 December 2010 Paper
Geometrical error correction research in high precision 2D laser measuring instrument
Xiao-man Zhang, Zi Xue
Proceedings Volume 7544, 75446O (2010) https://doi.org/10.1117/12.885566
KEYWORDS: Error analysis, Systems modeling, Photomasks, Charge-coupled devices, Computing systems, Image processing, Metrology, Precision measurement, Laser systems engineering, Data corrections
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