Dr. Xiaomei Chen
at Academy of Opto-Electronics CAS
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII
KEYWORDS: Spectroscopy, Particles, Copper, Silicon, Laser applications, Semiconducting wafers, Pulsed laser operation, Laser systems engineering

Proceedings Article | 14 May 2012 Paper
Proc. SPIE. 8378, Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences
KEYWORDS: Electronics, Control systems, Computer programming, Atomic force microscopy, Head, Signal processing, Atomic force microscope, Electronic filtering, Scanning tunneling microscopy, Phase shifts

Proceedings Article | 30 October 2001 Paper
Proc. SPIE. 4596, Advanced Photonic Sensors and Applications II
KEYWORDS: Optical fibers, Fiber Bragg gratings, Sensors, Calibration, Luminescence, Fiber optics sensors, Telecommunications, Ytterbium, Erbium, Temperature metrology

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