Dr. Xiaoping Li
at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (7)

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9426, Optical Microlithography XXVIII
KEYWORDS: Mathematical modeling, Lithography, Beam steering, Lithium, Mechanics, Beam delivery, 3D modeling, Modeling and simulation, Spherical lenses, Stress analysis

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Sensors, Water, Control systems, Process control, Photonic integrated circuits, Immersion lithography, Control systems design, Fuzzy logic, Temperature metrology, Liquids

PROCEEDINGS ARTICLE | November 21, 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Modulation, Polarization, Sensors, Reflectivity, Linear filtering, Modulators, Signal processing, Semiconducting wafers, Signal detection

PROCEEDINGS ARTICLE | November 21, 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Lithography, Switches, Optical lithography, Detection and tracking algorithms, Water, Control systems, Process control, Thallium, Nonlinear control, Temperature metrology

PROCEEDINGS ARTICLE | February 16, 2004
Proc. SPIE. 5648, Smart Materials III
KEYWORDS: Vanadium, Nanostructures, Solar energy, Sputter deposition, Metals, Annealing, Transition metals, Nanomaterials, Thin film coatings, Nanolithography

PROCEEDINGS ARTICLE | September 8, 1999
Proc. SPIE. 3862, 1999 International Conference on Industrial Lasers
KEYWORDS: Lithium, Error analysis, Coating, Manufacturing, Wavelength division multiplexing, Telecommunications, Transmittance, Electronic filtering, Optics manufacturing, Bandpass filters

Showing 5 of 7 publications
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