Xiaoqing Xu
at Univ of Texas at Austin
SPIE Involvement:
Author
Publications (6)

PROCEEDINGS ARTICLE | October 16, 2017
Proc. SPIE. 10451, Photomask Technology
KEYWORDS: Lithography, Data modeling, Feature extraction, Printing, Neural networks, Photomasks, Machine learning, Optical proximity correction, SRAF, Model-based design

SPIE Journal Paper | June 14, 2017
JM3 Vol. 16 Issue 02
KEYWORDS: Electron beam lithography, Extreme ultraviolet lithography, Computer programming, Lithography, Metals, Semiconductors, Directed self assembly, Manufacturing, Photomasks

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Semiconductors, Lithography, Metals, Manufacturing, Directed self assembly, Silicon carbide, New and emerging technologies

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Optical lithography, Metals, Legal, Optical tracking, Design for manufacturing, Photomasks, Double patterning technology, Computational lithography, Standards development, 193nm lithography, Design for manufacturability

SPIE Journal Paper | February 3, 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Lithography, Optical lithography, Photomasks, Standards development, Legal, Manufacturing, Logic, Electrochemical etching, Double patterning technology, Algorithms

PROCEEDINGS ARTICLE | March 18, 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Lithography, Logic, Optical lithography, Manufacturing, Legal, Photomasks, Double patterning technology, Standards development, 193nm lithography, Design for manufacturability

Showing 5 of 6 publications
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