Xiaosong Yang
at Semiconductor Manufacturing International Corp.
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Oxides, Lithography, Etching, Metals, Corrosion, Oxygen, Plasma etching, Photoresist processing, Semiconducting wafers, Plasma

PROCEEDINGS ARTICLE | April 2, 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Lithography, Optical lithography, Etching, Silicon, Coating, NOx, Plasma enhanced chemical vapor deposition, Photoresist processing, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top