Dr. Jason Li
at ASML Brion
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Photovoltaics, Logic, Optical lithography, Lithographic illumination, Sensors, Etching, Metals, Electroluminescence, Photomasks, Source mask optimization, Computational lithography, Optical proximity correction, Critical dimension metrology, Resolution enhancement technologies

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Logic, Lithium, Manufacturing, Inspection, Electroluminescence, Photomasks, Source mask optimization, Optical proximity correction, SRAF

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top