Dr. Xibin Zhou
Staff Engineer at Synopsys
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 24 March 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Reticles, Optical lithography, Atrial fibrillation, Manufacturing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Optical proximity correction, SRAF, Critical dimension metrology, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 6 April 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Infrared imaging, Phase contrast, Defect detection, Inspection, Phase shift keying, Computer simulations, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Defect inspection

Proceedings Article | 17 April 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Reticles, X-ray optics, Sensors, Wavefront sensors, Wavefronts, Optical testing, Zernike polynomials, Photomasks, Artificial intelligence, Prototyping

Proceedings Article | 1 April 2013
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Reticles, X-ray optics, Sensors, Interferometry, Wavefront sensors, Wavefronts, Optical testing, Zernike polynomials, Photomasks, Condition numbers

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