Dr. Ximan Jiang
at PIE Scientific LLC
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 18 April 2013 Paper
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Metals, Copper, Tungsten, Inspection, Scanning electron microscopy, Transmission electron microscopy, Monte Carlo methods, Semiconducting wafers, Chemical mechanical planarization, Virtual colonoscopy

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