Mr. Xin-Yang Zheng Profile

Xin-Yang Zheng

at National Taiwan Univ

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 10 July 2021

Jia-Syun Cai, Sheng-Wei Chien, Xin-Yang Zheng, Chien-Lin Lee, Kuen-Yu Tsai

JM3, Vol. 20, Issue 03, 033401, (July 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.3.033401

KEYWORDS: TCAD, Transistors, Device simulation, 3D modeling, Integrated circuits, Instrument modeling, Lithography, Error analysis, Logic, Doping

Proceedings Article | 20 March 2019 Presentation + Paper

Jia-Syun Cai, Sheng-Wei Chien, Xin-Yang Zheng, Chien-Lin Lee, Kuen-Yu Tsai

Proceedings Volume 10962, 109620I (2019) https://doi.org/10.1117/12.2515186

KEYWORDS: TCAD, Transistors, Device simulation, Extreme ultraviolet lithography, Lithography

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