Terahertz wave has been inspired great interests for its myriad applications, such as biochemical sensing and highbandwidth communications, etc. THz sources are the key technology toward the wide applications. Therefore, THz sources are highly focused on developments, especial those with wide band, high power, room temperature operation. Vacuum electronic THz sources are important directions in THz sources. Institute of Electronics, Chinese Academy of Sciences (IECAS) with the history over 60 years has developed many kinds of vacuum electronic devices, such as klystrons, space traveling wave tube amplifier (TWTA), Gyrotron and extended interaction oscillator (EIO), etc. In this paper, we report the progresses in IECAS of Terahertz traveling wave tube. The three types of TWT are described, the first kind of TWT is the high power for the pulse SAR and ViSAR, the second kind of TWTA is for the space satellite communication, and the third kind of TWT is the TWTA module. Through the studies of small size cathode, electron optics system, low attenuation high frequency structure, and high transmission window, the 220GHz TWT is developed. The experimental results show that the output power is 5.8W at the frequency of 215GHz, and signal bandwidth is 5GHz. The second kind of TWTA is the design and the TWTA module is being developed.