Dr. Xin Ju
at Natl Ins for Materials Science
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 28, 2003
Proc. SPIE. 5130, Photomask and Next-Generation Lithography Mask Technology X
KEYWORDS: Gold, Lithography, Mica, Etching, Chemical species, Copper, Transmission electron microscopy, Photomasks, Helium, Self-assembled monolayers

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