Mr. Xin Wang
at Aprio Technologies Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 5, 2005
Proc. SPIE. 5756, Design and Process Integration for Microelectronic Manufacturing III
KEYWORDS: Optical lithography, Data modeling, Manufacturing, Pollution control, Optical proximity correction, Optics manufacturing, Model-based design, Process modeling, Industrial chemicals, Resolution enhancement technologies

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