Dr. Xin Xu
at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 17, 2013
Proc. SPIE. 8763, Smart Sensors, Actuators, and MEMS VI
KEYWORDS: Microelectromechanical systems, Actuators, Sensors, Silicon, Power supplies, Microactuators, Finite element methods, Convection, Electromagnetism, Temperature metrology

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top