Xinchuan Liu
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Publications (8)

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Lithium, Molecular bridges, Silica, Sensors, Etching, Nickel, Silicon, Bridges, Plasma etching, Semiconducting wafers

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Oxides, Lithography, Etching, Interfaces, Silicon, Oxygen, Deep reactive ion etching, Semiconducting wafers, Oxidation, Nanowires

PROCEEDINGS ARTICLE | May 3, 2007
Proc. SPIE. 6556, Micro (MEMS) and Nanotechnologies for Defense and Security
KEYWORDS: Semiconductors, Lithography, Polymethylmethacrylate, Capacitors, Polymers, Metals, Silicon, Diodes, Aluminum, Heterojunctions

PROCEEDINGS ARTICLE | May 18, 2006
Proc. SPIE. 6223, Micro (MEMS) and Nanotechnologies for Space Applications
KEYWORDS: Microelectromechanical systems, Quantum wells, Sensors, Molecules, Silicon, Adsorption, Logic devices, Microfabrication, Chemical elements, Nanowires

PROCEEDINGS ARTICLE | May 16, 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Sensors, Particles, Molecules, Silicon, Adsorption, Microfabrication, Biomedical engineering, Laser optics, Molecular electronics, Absorption

PROCEEDINGS ARTICLE | May 16, 2005
Proc. SPIE. 5763, Smart Structures and Materials 2005: Smart Electronics, MEMS, BioMEMS, and Nanotechnology
KEYWORDS: Microelectromechanical systems, Thin films, Etching, Silicon, Surface roughness, Shape analysis, Deep reactive ion etching, Logic devices, Microfabrication, Semiconducting wafers

Showing 5 of 8 publications
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