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Prof. Xing'ao Li
at Nanjing Univ of Posts and Telecommunications
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 24 August 2009 Paper
Effect of power on the structure and property of copper nitride films by DC reactive magnetron sputtering
Xing-Ao Li, Jian-Ping Yang, An-You Zuo, Zuo-Bin Yuan, Zhu-Lin Weng, Xiao-Yong Xiong
Proceedings Volume 7381, 738110 (2009) https://doi.org/10.1117/12.833436
KEYWORDS: Copper, Sputter deposition, Crystals, Chemical species, Glasses, Atomic force microscopy, X-ray diffraction, Particles, Thin films, Semiconductors
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