Xinggang Wang
at Harbin Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 March 2019 Paper
Proceedings Volume 11053, 110530Y (2019) https://doi.org/10.1117/12.2508472
KEYWORDS: Spindles, Error analysis, Motion measurement, Sensors, Motion models, Optical testing, Semiconducting wafers, Charge-coupled devices, Adaptive optics, Capacitance

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