Mr. Xinghui Li
at Tohoku Univ
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | July 17, 2015
Proc. SPIE. 9524, International Conference on Optical and Photonic Engineering (icOPEN 2015)
KEYWORDS: Lithography, Diffraction, Mirrors, Light sources, Fringe analysis, Interferometers, Adaptive optics, Computer programming, Optical fabrication, Diffraction gratings

SPIE Journal Paper | May 12, 2014
OE Vol. 53 Issue 12
KEYWORDS: Computer programming, Motion measurement, Optical sensors, Sensors, Ferroelectric materials, Head, Laser beam diagnostics, Diffraction gratings, Interferometers, Prototyping

PROCEEDINGS ARTICLE | June 22, 2013
Proc. SPIE. 8769, International Conference on Optics in Precision Engineering and Nanotechnology (icOPEN2013)
KEYWORDS: Microscopes, Diffraction, Metrology, Lenses, Computer programming, Atomic force microscopy, Profiling, Micro optics, Optical scanning systems, Diffraction gratings

PROCEEDINGS ARTICLE | January 31, 2013
Proc. SPIE. 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Lithography, Diffraction, Mirrors, Light sources, Interferometers, Computer programming, Atomic force microscopy, Semiconductor lasers, Photoresist materials, Diffraction gratings

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