This paper presents a fabrication method of two-dimensional micro patterns for adaptive optics with a micrometric or sub-micrometric period to be used for fabrication of micro lens array or two-dimensional diffraction gratings. A multibeam two-axis Lloyd’s mirror interferometer is employed to carry out laser interference lithography for the fabrication of two-dimensional grating structures. In the proposed instrument, the optical setup consists of a light source providing a laser beam, a multi-beam generator, two plane mirrors to generate a two-dimensional XY interference pattern and a substrate on which the XY interference pattern is to be exposed. In this paper, pattern exposure tests are carried out by the developed optical configuration optimized by computer simulations. Some experimental results of the XY pattern fabrication will be reported.
A multiprobe surface encoder for optical metrology of six-degree-of-freedom (six-DOF) planar motions is presented. The surface encoder is composed of an XY planar scale grating with identical microstructures in X- and Y-axes and an optical sensor head. In the optical sensor head, three paralleled laser beams were used as laser probes. After being divided by a beam splitter, the three laser probes were projected onto the scale grating and a reference grating with identical microstructures, respectively. For each probe, the first-order positive and negative diffraction beams along the X- and Y-directions from the scale grating and from the reference grating superimposed with each other and four pieces of interference signals were generated. Three-DOF translational motions of the scale grating Δx, Δy, and Δz can be obtained simultaneously from the interference signals of each probe. Three-DOF angular error motions θX, θY, and θZ can also be calculated simultaneously from differences of displacement output variations and the geometric relationship among the three probes. A prototype optical sensor head was designed, constructed, and evaluated. Experimental results verified that this surface encoder could provide measurement resolutions of subnanometer and better than 0.1 arc sec for three-DOF translational motions and three-DOF angular error motions, respectively.
This keynote starts from an overview of micro-optics from fundamental functions, fabrication methods and applications
in precision engineering and nanotechnology. State-of-the-art measuring systems for surface form metrology of microoptics
with micro-structured surfaces, including diffractive micro-optics such as diffraction gratings and refractive
micro-optics such as micro lenses and micro-lens arrays, are then be presented. The measuring systems introduced in the
presentation are classified into scanning probe microscope-based systems, mechanical stylus profiling systems and
optical evaluation systems. Related research activities carried out in the authors' group are also highlighted.
To fabricate a scale grating for a surface encoder in a cost-effective way, a blue laser diode with a wavelength of 405 nm is employed in a Lloyd’s mirror interferometer to carry out interference lithography (IL) of the grating. The beams from the laser diode are collimated by an aspherical collimating lens to form beams with a diameter of 50 mm. These beams are then projected towards the Lloyd’s mirror and the grating substrate, which are aligned perpendicularly with each other and are mounted on a rotary stage. One half of the beam directly goes to the grating substrate, and the other half reaches to the grating substrate after being reflected by the mirror. The direct beam and the reflected beam interference with each other to generate and expose the interference fringes, which correspond to the scale grating structures, on the substrate coated with a photoresist layer. The pitch and area of the grating structures are set to be 570 nm and around 300 mm<sup>2</sup>, respectively. The fabricated grating structures are evaluated with an AFM to investigate the influence of the spectrum width of the laser beam.