Prof. Xinmin Shen
Lecturer at PLA University of Science and Technology
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | October 28, 2016
Proc. SPIE. 9683, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies
KEYWORDS: Oxides, Polishing, Statistical analysis, Silicon, Atomic force microscopy, Abrasives, Silicon carbide, Thermal oxidation, Surface finishing, Oxidation

SPIE Journal Paper | October 18, 2016
OE Vol. 55 Issue 10
KEYWORDS: Silicon carbide, Surface finishing, Polishing, Surface roughness, Atmospheric plasma, Oxides, Plasma, Silicon, Scanning electron microscopy, Abrasives

SPIE Journal Paper | October 22, 2015
OE Vol. 54 Issue 10
KEYWORDS: Oxidation, Polishing, Silicon carbide, Oxides, Surface finishing, Surface roughness, Scanning electron microscopy, Silicon, Optical engineering, Abrasives

SPIE Journal Paper | May 22, 2015
OE Vol. 54 Issue 05
KEYWORDS: Polishing, Silicon carbide, Plasma, Surface finishing, Oxides, Silicon, Surface roughness, Scanning electron microscopy, Radium, Oxidation

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