Xiongbang Wei
at Univ of Electronic Science and Technology of China
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 23 December 2013
Proc. SPIE. 9043, 2013 International Conference on Optical Instruments and Technology: Optoelectronic Devices and Optical Signal Processing
KEYWORDS: Sputter deposition, Vanadium, Thin films, Oxides, Plasma, Crystals, Absorption, Temperature metrology, Oxygen, Refractive index

Proceedings Article | 21 December 2013
Proc. SPIE. 9047, 2013 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
KEYWORDS: Etching, Reactive ion etching, Aluminum, Plasma, Gases, Thin films, Chlorine, Semiconducting wafers, Optical lithography, Copper

Proceedings Article | 11 March 2008
Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications
KEYWORDS: Thin films, Glasses, Silicon, Vanadium, Resistance, Oxides, Crystals, Sputter deposition, Thin film deposition, Atomic force microscopy

Proceedings Article | 11 March 2008
Proc. SPIE. 6984, Sixth International Conference on Thin Film Physics and Applications
KEYWORDS: Thin films, Resistance, Temperature metrology, Vanadium, Sputter deposition, Oxides, Atomic force microscopy, Thin film deposition, Scattering, Thin film devices

Proceedings Article | 27 November 2007
Proc. SPIE. 6723, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment
KEYWORDS: Thin films, Vanadium, Oxides, Photovoltaics, Thin film solar cells, Resistance, Solar energy, Silicon, Silicon films, Environmental sensing

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