Prof. Xiuguo Chen
at Huazhong Univ of Science And Technology
SPIE Involvement:
Author
Publications (20)

Proceedings Article | 19 November 2021 Paper
Proceedings Volume 12059, 120591K (2021) https://doi.org/10.1117/12.2612253
KEYWORDS: Scattering, 3D metrology, Diffraction, X-rays, 3D modeling, Computer architecture, Metrology, Transmission electron microscopy

Proceedings Article | 19 November 2021 Paper
Proceedings Volume 12059, 120591M (2021) https://doi.org/10.1117/12.2612769
KEYWORDS: Data modeling, Statistical modeling, Scattering, Diffraction, X-rays, Scatterometry, Convolution, Inverse problems, Metrology, Optics manufacturing

Proceedings Article | 23 March 2020 Paper
Zhiyong Yang, Xiuguo Chen, Yating Shi, Hao Jiang, Shiyuan Liu
Proceedings Volume 11327, 1132719 (2020) https://doi.org/10.1117/12.2552187
KEYWORDS: Lithography, Nanoimprint lithography, Turbulence, Principal component analysis, Wavefront aberrations, Coherence imaging, Imaging systems, Image processing, Photomasks, Image quality

Proceedings Article | 22 July 2019 Presentation
Proceedings Volume 11057, 110570O (2019) https://doi.org/10.1117/12.2525931
KEYWORDS: Scatterometry, Nanostructures, Metrology, Tomography, Silicon, Polarization, Optics manufacturing, Scanning electron microscopy, Photoresist materials, Critical dimension metrology

Proceedings Article | 21 June 2019 Presentation + Paper
Proceedings Volume 11057, 110570Q (2019) https://doi.org/10.1117/12.2525944
KEYWORDS: Mueller-matrix tomography, Mueller matrices, Jones vectors, Electromagnetic scattering, Imaging metrology, Diffraction, Image acquisition, Imaging systems, Objectives, Electromagnetism, Light scattering, Optical imaging, Scatterometry, Polarization, Scattering

Showing 5 of 20 publications
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