Dr. Xiuguo Chen
at Huazhong Univ of Science And Technology
SPIE Involvement:
Author
Publications (18)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11327, Optical Microlithography XXXIII
KEYWORDS: Lithography, Coherence imaging, Principal component analysis, Imaging systems, Image processing, Wavefront aberrations, Image quality, Turbulence, Photomasks, Nanoimprint lithography

Proceedings Article | 22 July 2019 Presentation
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Nanostructures, Metrology, Polarization, Silicon, Scanning electron microscopy, Tomography, Photoresist materials, Scatterometry, Critical dimension metrology, Optics manufacturing

Proceedings Article | 21 June 2019 Presentation + Paper
Proc. SPIE. 11057, Modeling Aspects in Optical Metrology VII
KEYWORDS: Optical imaging, Diffraction, Mueller matrices, Polarization, Imaging systems, Scattering, Light scattering, Image acquisition, Scatterometry, Objectives, Electromagnetism, Jones vectors, Electromagnetic scattering, Imaging metrology, Mueller-matrix tomography

Proceedings Article | 7 March 2019 Paper
Proc. SPIE. 11053, Tenth International Symposium on Precision Engineering Measurements and Instrumentation
KEYWORDS: Ellipsometry, Modulation, Polarization, Spectroscopy, Molecules, Wave plates, Liquid crystals

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Refractive index, Lithographic illumination, Magnesium fluoride, Polarization, Diagnostics, Wave plates, Polarimetry, Sapphire, Process control, Immersion lithography, Geometrical optics, Algorithms

Showing 5 of 18 publications
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