Dr. Xiuguo Chen
Post-Doc at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (14)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Refractive index, Lithographic illumination, Magnesium fluoride, Polarization, Diagnostics, Wave plates, Polarimetry, Sapphire, Process control, Immersion lithography, Geometrical optics, Algorithms

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Ellipsometry, Nanostructures, Mueller matrices, Metrology, Sensors, Matrices, Silicon, Wave plates, Scanning electron microscopy, Prototyping

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Optical components, Magnesium fluoride, Polarization, Calibration, Error analysis, Crystals, Wave plates, Wave propagation, Geometrical optics, Prototyping

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Nanostructures, Error analysis, Transmission electron microscopy, Scatterometry, Inverse problems, Process control, Integrated optics, Chemical elements, Optics manufacturing, Inverse optics

PROCEEDINGS ARTICLE | October 10, 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Mueller matrices, Metrology, Data modeling, Silicon, Polarimetry, Scanning electron microscopy, Photoresist materials, Scatterometry, Optics manufacturing, Statistical modeling

SPIE Journal Paper | August 19, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Error analysis, Mueller matrices, Polarimetry, Silicon, Chemical elements, Statistical analysis, Scanning electron microscopy, Inverse problems, Estimation theory, Diffraction

Showing 5 of 14 publications
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