Dr. Xiuguo Chen
Post-Doc at Huazhong Univ of Science and Technology
SPIE Involvement:
Author
Publications (14)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Wave plates, Polarimetry, Immersion lithography, Algorithms, Lithography, Polarization, Magnesium fluoride, Process control, Diagnostics, Lithographic illumination, Sapphire, Refractive index, Geometrical optics

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Matrices, Silicon, Wave plates, Nanostructures, Mueller matrices, Metrology, Ellipsometry, Scanning electron microscopy, Sensors, Prototyping

PROCEEDINGS ARTICLE | June 21, 2015
Proc. SPIE. 9526, Modeling Aspects in Optical Metrology V
KEYWORDS: Polarization, Magnesium fluoride, Calibration, Crystals, Optical components, Error analysis, Wave plates, Geometrical optics, Wave propagation, Prototyping

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Inverse optics, Scatterometry, Inverse problems, Optics manufacturing, Transmission electron microscopy, Error analysis, Integrated optics, Nanostructures, Process control, Chemical elements

PROCEEDINGS ARTICLE | October 10, 2013
Proc. SPIE. 8916, Sixth International Symposium on Precision Mechanical Measurements
KEYWORDS: Metrology, Scatterometry, Photoresist materials, Mueller matrices, Optics manufacturing, Data modeling, Scanning electron microscopy, Statistical modeling, Polarimetry, Silicon

SPIE Journal Paper | August 19, 2013
JM3 Vol. 12 Issue 03
KEYWORDS: Error analysis, Mueller matrices, Polarimetry, Silicon, Chemical elements, Statistical analysis, Scanning electron microscopy, Inverse problems, Estimation theory, Diffraction

Showing 5 of 14 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top