Xiujuan Liu
at Shanghai Institute of Technical Physics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | November 20, 2014
Proc. SPIE. 9300, International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications
KEYWORDS: Annealing, X-rays, Interfaces, Ions, Silicon, Chemical vapor deposition, Gallium nitride, Silicon films, Gallium, Plasma

PROCEEDINGS ARTICLE | November 20, 2014
Proc. SPIE. 9300, International Symposium on Optoelectronic Technology and Application 2014: Infrared Technology and Applications
KEYWORDS: Infrared detectors, Lithography, Optical microscopes, Mercury cadmium telluride, Etching, Argon, Gases, Photoresist materials, Reactive ion etching, Plasma

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