Dr. Xizhao Lu
at Huaqiao University
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | January 26, 2016
Proc. SPIE. 9903, Seventh International Symposium on Precision Mechanical Measurements
KEYWORDS: Microscopes, Edge detection, Error analysis, Laser processing, Reliability, Laser applications, Laser drilling, Time metrology, Laser stabilization, Tolerancing

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
KEYWORDS: Microelectromechanical systems, Confocal microscopy, Silica, Etching, Quartz, Chemical species, Crystals, Scanning electron microscopy, Semiconducting wafers, HF etching

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