Xu Chen
at Soochow Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 2 November 2018
Proc. SPIE. 10818, Holography, Diffractive Optics, and Applications VIII
KEYWORDS: Diffraction, Holography, Metrology, Lithium, Etching, Atomic force microscopy, Photoresist materials, Photomasks, Photoresist developing, Diffraction gratings

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