Xu Huang
at Nanyang Technological Univ
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 November 2002
Proc. SPIE. 4934, Smart Materials II
KEYWORDS: Thin films, Argon, Chemical species, Annealing, Crystals, Silicon, Oxygen, Semiconducting wafers, Shape memory alloys, Temperature metrology

Proceedings Article | 11 July 2001
Proc. SPIE. 4333, Smart Structures and Materials 2001: Active Materials: Behavior and Mechanics
KEYWORDS: Thin films, Argon, Sputter deposition, Crystals, Copper, X-ray diffraction, Nickel, Silicon, Semiconducting wafers, Shape memory alloys

Proceedings Article | 20 October 2000
Proc. SPIE. 4230, Micromachining and Microfabrication
KEYWORDS: Microelectromechanical systems, Thin films, Argon, Sputter deposition, Crystals, X-ray diffraction, Nickel, Silicon, Shape memory alloys, Temperature metrology

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