Xudi Wang
at Univ of Science and Technology of China
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Electron beam lithography, Etching, Polymers, Glasses, Ultraviolet radiation, Silicon, Manufacturing, Deep reactive ion etching, Nanoimprint lithography, Nanophotonics

PROCEEDINGS ARTICLE | February 3, 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Microfluidics, Nanoparticles, Polymers, Capillaries, Glasses, Interfaces, Silicon, Scanning electron microscopy, Nanolithography, Polymer thin films

PROCEEDINGS ARTICLE | February 7, 2005
Proc. SPIE. 5636, Holography, Diffractive Optics, and Applications II
KEYWORDS: Etching, Argon, Ions, Chemistry, Photoresist materials, Ion beams, Reactive ion etching, Hafnium, Hybrid fiber optics, Plasma

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