Dr. Xudi Wang
at Hefei Univ of Technology
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 22 October 2010
Proc. SPIE. 7657, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Nanostructures, Diffraction, Transparency, Polymers, Glasses, Manufacturing, Nanoimprint lithography, Positron emission tomography, Nanolithography, Diffraction gratings

Proceedings Article | 4 January 2008
Proc. SPIE. 6831, Nanophotonics, Nanostructure, and Nanometrology II
KEYWORDS: Gold, Lithography, Nanostructures, Iron, Etching, Magnetism, Oxygen, Cobalt, Tantalum, Nanolithography

Proceedings Article | 28 November 2007
Proc. SPIE. 6724, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems
KEYWORDS: Electron beam lithography, Etching, Silicon, Photomasks, Deep reactive ion etching, Reactive ion etching, Photoresist processing, Nanolithography, Standards development, Chemically amplified resists

Proceedings Article | 21 November 2007
Proc. SPIE. 6827, Quantum Optics, Optical Data Storage, and Advanced Microlithography
KEYWORDS: Polymethylmethacrylate, Polymers, Glasses, Ultraviolet radiation, Silicon, Scanning electron microscopy, Transmittance, Semiconducting wafers, Wafer bonding, Nanolithography

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