Proc. SPIE. 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems
KEYWORDS: Actuators, Reflectors, Mirrors, Optical design, Sensors, Control systems, Servomechanisms, Structural design, Mirror structures, Control systems design
A fast-steering mirror (FSM) with self-aligning ball bearing supporting structure was designed to accurately control the transmission direction of high-octane laser. First, linear voice coil actuators were selected and SiC mirror, rigid supporting structure, precise grating sensors for measuring mirror position were designed respectively on the basis of the fast-steering mirror working conditions and performing requirements. After finishing accurately manufacturing and assembling of mechanism parts, the servo control system was constituted, and then the designed FSM system was tested by experiments. The results showed that the FSM with self-aligning ball bearing supporting structure has not only great carrying capacity and resonance frequency, but it also has excellent angle stability (the stable precision of mirror is more than 2″). Furthermore, the FSM system has great adaptability to vibrancy, impact and rotation. Therefore, the designed FSM can satisfy application requirements of precise beam control system.
Polarized laser phase shifting method is adopted in this single frequency laser interferometer to solve “zero drift” of laser intensity in conventional single frequency laser interferometer. The measurement stability and repeatability are improved by means of common optical path arrangement. The resolution power of the interferometer is improved by using optical path difference doubling technique. In the experiment the main factors that affect the length measurement precision are analyzed and calculated. Results obtained are shown.