Dr. Xue Chuan Shan Profile

Dr. Xue Chuan Shan

at Singapore Institute of Manufacturing Technology

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Author

Publications (10)

Proceedings Article | 7 February 2006 Paper

Process simulation of Kovar-glass-silicon bonding for micromachined combustor

Ying Zhao, Min Miao, Xue Chuan Shan, Yufeng Jin, Chee Khuen Wong

Proceedings Volume 6032, 60320C (2006) https://doi.org/10.1117/12.667859

KEYWORDS: Glasses, Silicon, Semiconducting wafers, Metals, Deep reactive ion etching, Combustion, Prototyping, Microelectromechanical systems, Etching, Manufacturing

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Proceedings Article | 23 February 2005 Paper

Development of a MEMS-based micro combustor for a micro gas turbine engine

Xue Chuan Shan, Zhen Wang, Yu Jin, Chee Khuen Wong, Y. Murakoshi, Ryutaro Maeda

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.580783

KEYWORDS: Semiconducting wafers, Deep reactive ion etching, Combustion, Etching, Temperature metrology, Silicon, Hydrogen, Prototyping, Photoresist materials, Optical lithography

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Proceedings Article | 22 January 2005 Paper

Universal fixture for assembling and testing of a silicon-based microcombustor

Chee Khuen Wong, Zhenfeng Wang, Yufeng Jin, Haixia Zhang, Xue Chuan Shan

Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.588962

KEYWORDS: Combustion, Silicon, Temperature metrology, Hydrogen, Semiconducting wafers, Metals, Interfaces, Crystals, Prototyping, Surface finishing

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Proceedings Article | 2 April 2004 Paper

High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Yoichi Murakoshi, Zhenfeng Wang, Ryutaro Maeda, H. Lu, C. Wong, Xue Shan, Tsuyoshi Ikehara, Yufeng Jin

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522918

KEYWORDS: Semiconducting wafers, Etching, Deep reactive ion etching, Plasma, Silicon, Photoresist materials, Photomasks, Ions, Surface roughness, Process control

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Proceedings Article | 2 April 2004 Paper

Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

Ryutaro Maeda, Masaharu Takahashi, Xue-Chuan Shan, Yoichi Murakoshi, Toshio Sano

Proceedings Volume 5276, (2004) https://doi.org/10.1117/12.522898

KEYWORDS: Mirrors, Nickel, Optical switching, Microelectromechanical systems, Polymers, Optical design, Scanning electron microscopy, Nanoelectromechanical systems, Optical semiconductors, Semiconductors

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Proceedings Article | 21 January 2003 Paper

Development of 1X4 micro-optical switch based on SOI vertical micromirror technology

Zhenfeng Wang, Xue Chuan Shan, Nico de Rooij, Wenqing Cao, Jianfeng Xu, Siak-Piang Lim, Zhiping Wang, Wilfried Noell

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.472787

KEYWORDS: Mirrors, Switches, Optical switching, Actuators, Packaging, Silicon, Deep reactive ion etching, Finite element methods, Fiber optics, Micromirrors

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Proceedings Article | 16 January 2003 Paper

Dual-function leak detector for MEMS devices

Min Miao, P. Lim, X. Shi, Yufeng Jin, X. Shan, Zhiping Wang, Zhen Feng Wang

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472715

KEYWORDS: Sensors, Microelectromechanical systems, Helium, Silicon, Packaging, Protactinium, Detector development, Optical switching, Glasses, Semiconducting wafers

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Proceedings Article | 13 November 2002 Paper

Optimization of Au mask fabrication processes for LIGA applications

Tsuyoshi Ikehara, T. Hattori, Ryutaro Maeda, H. Mekaru, Xue Shan

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.471926

KEYWORDS: Gold, Photomasks, Etching, X-rays, Mirrors, Optical switching, Electroplating, Micromirrors, Polymethylmethacrylate, Photoresist materials

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Proceedings Article | 13 November 2002 Paper

Development of a micro hot embossing process for fabricating micro optical devices

Ryutaro Maeda, Yoichi Murakoshi, Xue Shan

Proceedings Volume 4936, (2002) https://doi.org/10.1117/12.469430

KEYWORDS: Mirrors, Optical switching, Switches, Polymers, Annealing, Micromirrors, Nickel, Silicon, Optical components, Microelectromechanical systems

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Proceedings Article | 19 April 2002 Paper

Development of a new 1x4 micro-optical switch

Siak-Piang Lim, Xue Shan, Zhiping Wang, Wilfried Noell, Nico de Rooij, K. Lee, Z. Wang

Proceedings Volume 4755, (2002) https://doi.org/10.1117/12.462854

KEYWORDS: Mirrors, Optical switching, Switching, Silicon, Switches, Deep reactive ion etching, Reflection, Structured optical fibers, Actuators, Single mode fibers

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Showing 5 of 10 publications

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