Dr. Xue Chuan Shan
at Singapore Institute of Manufacturing Technology
SPIE Involvement:
Author
Publications (10)

Proceedings Article | 7 February 2006 Paper
Proc. SPIE. 6032, ICO20: MEMS, MOEMS, and NEMS
KEYWORDS: Microelectromechanical systems, Etching, Metals, Glasses, Silicon, Manufacturing, Combustion, Deep reactive ion etching, Semiconducting wafers, Prototyping

Proceedings Article | 23 February 2005 Paper
Proc. SPIE. 5650, Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
KEYWORDS: Optical lithography, Etching, Silicon, Hydrogen, Combustion, Photoresist materials, Deep reactive ion etching, Semiconducting wafers, Prototyping, Temperature metrology

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5716, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS IV
KEYWORDS: Metals, Crystals, Interfaces, Silicon, Hydrogen, Combustion, Semiconducting wafers, Prototyping, Surface finishing, Temperature metrology

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Etching, Ions, Silicon, Surface roughness, Photoresist materials, Process control, Photomasks, Deep reactive ion etching, Semiconducting wafers, Plasma

Proceedings Article | 2 April 2004 Paper
Proc. SPIE. 5276, Device and Process Technologies for MEMS, Microelectronics, and Photonics III
KEYWORDS: Microelectromechanical systems, Semiconductors, Mirrors, Optical design, Polymers, Nickel, Scanning electron microscopy, Optical switching, Nanoelectromechanical systems, Optical semiconductors

Showing 5 of 10 publications
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