Dr. Xuefeng Zeng
Senior Application Consultant at Siemens EDA
SPIE Involvement:
Publications (5)

Proceedings Article | 30 April 2023 Presentation
Proceedings Volume PC12499, PC1249905 (2023) https://doi.org/10.1117/12.2662778
KEYWORDS: Semiconducting wafers, Photomasks, Optical proximity correction, Scanning electron microscopy, Calibration, Optical simulations, Machine learning, Wafer-level optics, Semiconductors, Semiconductor manufacturing

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11609, 1160916 (2021) https://doi.org/10.1117/12.2584767
KEYWORDS: Stochastic processes, Pattern recognition, Semiconducting wafers, Wafer inspection, Inspection, Defect detection, Metrology, Failure analysis, Data modeling, Calibration

Proceedings Article | 12 April 2016 Paper
Na Cai, Xuefeng Zeng, Kevin Wu, Ho Young Song, Weihong Gao, Qing Tian, Chris Lei, Kewen Gao, Liuchen Wang, Yan Zhao
Proceedings Volume 9778, 977834 (2016) https://doi.org/10.1117/12.2218887
KEYWORDS: Inspection, Scanning electron microscopy, Copper, Semiconducting wafers, Defect inspection, Optical inspection, Back end of line, Chemical mechanical planarization, Electrons, Wafer inspection

Proceedings Article | 25 March 2016 Paper
Weihong Gao, Xuefeng Zeng, Peter Lin, Yan Pan, Ho Young Song, Hoang Nguyen, Na Cai, Zhijin Chen, Khurram Zafar
Proceedings Volume 9778, 97783Q (2016) https://doi.org/10.1117/12.2235347
KEYWORDS: Inspection, Optical proximity correction, Image classification, Semiconductors, Virtual colonoscopy, Diffusion, Metals, Data analysis, Failure analysis, Defect inspection, Ions, Electron beams, Defect detection, Back end of line

Proceedings Article | 19 February 2009 Paper
Proceedings Volume 7167, 71670L (2009) https://doi.org/10.1117/12.809588
KEYWORDS: Microlens, Luminescence, Liquids, Microfluidics, Microlens array, Signal detection, Interfaces, Lab on a chip, Control systems, Pathogens

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