Dr. Xuefeng Zeng
Staff Engineer at ASML Silicon Valley
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 12 April 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Copper, Electrons, Inspection, Scanning electron microscopy, Optical inspection, Wafer inspection, Semiconducting wafers, Chemical mechanical planarization, Back end of line, Defect inspection

Proceedings Article | 25 March 2016 Paper
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Semiconductors, Electron beams, Defect detection, Metals, Ions, Diffusion, Inspection, Image classification, Optical proximity correction, Failure analysis, Virtual colonoscopy, Back end of line, Data analysis, Defect inspection

Proceedings Article | 19 February 2009 Paper
Proc. SPIE. 7167, Frontiers in Pathogen Detection: From Nanosensors to Systems
KEYWORDS: Microfluidics, Microlens array, Luminescence, Interfaces, Control systems, Pathogens, Lab on a chip, Microlens, Signal detection, Liquids

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