Dr. Xuelian Zhu
Sr. Engineer TD Research at GLOBALFOUNDRIES Inc
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Publications (5)

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithography, Optical design, Logic, Optical lithography, Manufacturing, Resistance, Capacitance, Extreme ultraviolet lithography, Yield improvement, Design for manufacturability

PROCEEDINGS ARTICLE | April 17, 2012
Proc. SPIE. 8352, 28th European Mask and Lithography Conference
KEYWORDS: Mirrors, Defect detection, Inspection, Reflectivity, Scanning electron microscopy, Optical inspection, Photomasks, Extreme ultraviolet, Semiconducting wafers, Defect inspection

PROCEEDINGS ARTICLE | March 14, 2012
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Immersion lithography, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | February 16, 2009
Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX
KEYWORDS: Diamond, Modulation, Nanoparticles, Silicon, Physics, Photonic crystals, Scanning electron microscopy, Tolerancing, Nanolithography, Diamond patterning

PROCEEDINGS ARTICLE | February 14, 2009
Proc. SPIE. 7223, Photonic and Phononic Crystal Materials and Devices IX
KEYWORDS: Lithography, Holography, Silica, Polymers, Crystals, Silicon, Photonic crystals, Distortion, Photoresist materials, Refraction

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