Dr. Xuelong Cao
at KLA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 May 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Oxides, Thin films, Ellipsometry, Dispersion, Inspection, Diagnostics, Reflectometry, Reflectance spectroscopy, Semiconducting wafers, Line scan image sensors

Proceedings Article | 24 May 2004
Proc. SPIE. 5375, Metrology, Inspection, and Process Control for Microlithography XVIII
KEYWORDS: Oxides, Lithography, Metrology, Inspection, Photoresist materials, 3D metrology, Process control, Finite element methods, Critical dimension metrology, Semiconducting wafers

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