Dr. Xuepeng Gong
at CIOMP
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 6, 2015
Proc. SPIE. 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation
KEYWORDS: Carbon, Mirrors, Contamination, Data modeling, Molecules, Extreme ultraviolet, Extreme ultraviolet lithography, Spherical lenses, EUV optics, Instrument modeling

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