Dr. Xuequn Zhang
at EMPA Duebendorf
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 July 2004 Paper
Proceedings Volume 5385, (2004) https://doi.org/10.1117/12.540888
KEYWORDS: Silicon, Dielectrics, Actuators, Temperature metrology, Electroactive polymers, Glasses, Silicon films, Polymers, Thin films, Electrodes

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