Prof. Xuhui Xie Profile

Prof. Xuhui Xie

at National Univ of Defense Technology

SPIE Involvement:

Author

Publications (19)

Proceedings Article | 16 January 2019 Paper

Investigation of obliquely incident processing during inductively coupled plasma

Zuocai Dai, Lin Zhou, Xuhui Xie, Zihao Gan

Proceedings Volume 10838, 108380Y (2019) https://doi.org/10.1117/12.2505139

KEYWORDS: Plasma, Silica, Freeform optics, Fabrication

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Proceedings Article | 16 January 2019 Paper

Optimization of motion mode for improving the stability of removal function

Lunsheng Liang, Ci Song, Xuhui Xie, Hang Du, Feng Guan

Proceedings Volume 10838, 108380Z (2019) https://doi.org/10.1117/12.2505141

KEYWORDS: Planets, Polishing, Defense technologies, Computer simulations, Optical components, 3D modeling, Optics manufacturing, Motion models, Surface finishing, MATLAB

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Proceedings Article | 24 October 2017 Paper

The research on material removal characteristic of reactive ion beam figuring for optics mirrors

Zhenpeng Zhang, Xuhui Xie, Lin Zhou, Ying Lu, Zuocai Dai

Proceedings Volume 10460, 104600Z (2017) https://doi.org/10.1117/12.2284439

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Proceedings Article | 28 October 2016 Paper

Optical material removal property analysis of Ar+ and Kr+ in ion beam figuring

Ying Lu, Xu Hui Xie, Lin Zhou, Zuo Cai Dai, Gui Yang Chen

Proceedings Volume 9683, 968308 (2016) https://doi.org/10.1117/12.2243767

KEYWORDS: Argon, Krypton, Ion beams, Ion beam finishing, Sputter deposition, Ions, Chemical species, Silicon, Optical components, Optical simulations

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Proceedings Article | 28 October 2016 Paper

Rapidly removing grinding damage layer on fused silica by inductively coupled plasma processing

Heng Chen, Lin Zhou, Xuhui Xie, Baolu Shi, Haobin Xiong

Proceedings Volume 9683, 96830B (2016) https://doi.org/10.1117/12.2244602

KEYWORDS: Plasma, Silica, Atmospheric plasma, Optical components, Polishing, Argon, Ceramics, Surface finishing, Chemical species, Chemical reactions

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Proceedings Article | 19 October 2016 Paper

Computations involved in IBF process and introduction of the software IBFCAM

Lin Zhou, Yifan Dai, Xuhui Xie, Shengyi Li

Proceedings Volume 10154, 101541S (2016) https://doi.org/10.1117/12.2247130

KEYWORDS: Ion beam finishing, Optical fabrication, Ion beams

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Proceedings Article | 19 October 2016 Paper

Study on surface roughness evolvement of Nd-doped phosphate glass after IBF

Furen Li, Xuhui Xie, Lin Zhou, Guipeng Tie, Hao Hu

Proceedings Volume 10154, 1015407 (2016) https://doi.org/10.1117/12.2243873

KEYWORDS: Surface roughness, Glasses, Ion beam finishing, Ion beams

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Proceedings Article | 22 July 2016 Paper

A large size ion beam figuring system for 1.2m astronomical telescopes fabrication

Xuhui Xie, Bing Yang, Lin Zhou, Ci Song, Hao Hu

Proceedings Volume 9912, 99120E (2016) https://doi.org/10.1117/12.2232228

KEYWORDS: Ion beams, Silicon carbide, Astronomical telescopes, Defense technologies, Silicon carbide, Mirrors, Ions, Surface finishing, Off axis mirrors, Servomechanisms, Optical design

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Proceedings Article | 22 July 2016 Paper

Combined fabrication technique for high-precision aspheric optical windows

Hao Hu, Ci Song, Xuhui Xie

Proceedings Volume 9912, 99123W (2016) https://doi.org/10.1117/12.2232220

KEYWORDS: Surface finishing, Spatial frequencies, Polishing, Surface finishing, Spatial frequencies, Fabrication, Magnetorheological finishing, Optical components, Aspheric lenses, Polishing, Surface plasmons, Etching, Ion beam finishing

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SPIE Journal Paper | 7 October 2015 Open Access

Obliquely incident ion beam figuring

Lin Zhou, Yifan Dai, Xuhui Xie, Shengyi Li

OE, Vol. 54, Issue 10, 105101, (October 2015) https://doi.org/10.1117/12.10.1117/1.OE.54.10.105101

KEYWORDS: Ion beam finishing, Ion beams, Ions, Error analysis, Optical engineering, Sputter deposition, Defense technologies, Roads, Mirrors, Surface finishing

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SPIE Journal Paper | 4 September 2014

Influence of material removal programming on ion beam figuring of high-precision optical surfaces

Wenlin Liao, Yifan Dai, Xuhui Xie

OE, Vol. 53, Issue 09, 095101, (September 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.9.095101

KEYWORDS: Error analysis, Ion beams, Computer programming, Ion beam finishing, Surface finishing, Optical engineering, Optical components, Spatial frequencies, Polishing, Lithography

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Proceedings Article | 6 August 2014 Paper

A high efficiency machining method of SiC: ion-enhanced atmospheric pressure plasma machining

Baolu Shi, Xuhui Xie, Yifan Dai, Chunde Liao

Proceedings Volume 9281, 928104 (2014) https://doi.org/10.1117/12.2069012

KEYWORDS: Plasma, Silicon carbide, Atmospheric plasma, Argon, Chemical species, Fluorine, Ions, Plasma generation, Etching, Surface roughness

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Proceedings Article | 6 August 2014 Paper

Ultra-precision process of CaF2 single crystal

Guoju Yin, Shengyi Li, Xuhui Xie, Lin Zhou

Proceedings Volume 9281, 92811I (2014) https://doi.org/10.1117/12.2069015

KEYWORDS: Surface finishing, Chemical mechanical planarization, Polishing, Crystals, Ion beam finishing, Surface roughness, Ion beams, Silica, Laser crystals, Particles

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SPIE Journal Paper | 27 June 2014

Nanopatterning of optical surfaces during low-energy ion beam sputtering

Wenlin Liao, Yifan Dai, Xuhui Xie

OE, Vol. 53, Issue 06, 065108, (June 2014) https://doi.org/10.1117/12.10.1117/1.OE.53.6.065108

KEYWORDS: Nanostructures, Ion beams, Sputter deposition, Silicon, Silica, Ions, Zerodur, Optics manufacturing, Ion beam finishing, X-ray optics

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SPIE Journal Paper | 7 January 2013 Open Access

Combined figuring technology for high-precision optical surfaces using a deterministic ion beam material adding and removal method

Wenlin Liao, Yifan Dai, Xuhui Xie, Lin Zhou

OE, Vol. 52, Issue 01, 010503, (January 2013) https://doi.org/10.1117/12.10.1117/1.OE.52.1.010503

KEYWORDS: Ion beam finishing, Ion beams, Surface roughness, Ions, Spatial frequencies, Error analysis, Particles, Defense technologies, Convolution, EUV optics

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SPIE Journal Paper | 13 March 2012

Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors

Wenlin Liao, Yifan Dai, Xuhui Xie, Lin Zhou, Zheng Yuan

OE, Vol. 51, Issue 03, 033402, (March 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.3.033402

KEYWORDS: Error analysis, Ion beams, Ion beam finishing, Mirrors, Error control coding, Photovoltaics, Ions, Optical engineering, Spatial frequencies, Silica

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SPIE Journal Paper | 6 February 2012

High thermal expansion optical component machined by ion beam figuring

Xuhui Xie, Yu Hao, Lin Zhou, Yifan Dai, Shengyi Li

OE, Vol. 51, Issue 1, 013401, (February 2012) https://doi.org/10.1117/12.10.1117/1.OE.51.1.013401

KEYWORDS: Ion beams, Ion beam finishing, Temperature metrology, Optical components, Ions, Thermal modeling, Copper, Optical engineering, Thermal effects, Monte Carlo methods

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Proceedings Article | 21 November 2007 Paper

Optimized method for manufacturing large aspheric surfaces

Xusheng Zhou, Shengyi Li, Yifan Dai, Xuhui Xie

Proceedings Volume 6721, 67210G (2007) https://doi.org/10.1117/12.782931

KEYWORDS: Polishing, Surface finishing, Aspheric lenses, Manufacturing, Abrasives, Mirrors, Optics manufacturing, Iron, Glasses, Error control coding

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Proceedings Article | 14 November 2007 Paper

Ion beam figuring system in NUDT

Lin Zhou, Xuhui Xie, Yifan Dai, Changjun Jiao, Shengyi Li

Proceedings Volume 6722, 67224A (2007) https://doi.org/10.1117/12.783658

KEYWORDS: Ion beams, Ion beam finishing, Surface finishing, Silicon carbide, Ions, Process control, Polishing, Chemical vapor deposition, Defense technologies, Plano

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Showing 5 of 19 publications

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