Mr. Xuming Wu
at Shanghai Institute of Optics and Fine Mechanics
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 12, 2003
Proc. SPIE. 5201, Photonic Devices and Algorithms for Computing V
KEYWORDS: Diffraction, Refractive index, Optical design, Manufacturing, Solids, Micro optics, Photomasks, Optical alignment, Tolerancing, Diffraction gratings

PROCEEDINGS ARTICLE | November 3, 2003
Proc. SPIE. 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II
KEYWORDS: Etching, Quartz, Argon, Polymers, Ions, Photoresist materials, Plasma etching, Chemical elements, Plasma systems, Plasma

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