A miniaturized EDM (Electro Discharge Machining) device has been designed which is suitable to fixing on robot, and
the whole system can motion mobile working. A novel control strategy of differential driving principle has been
presented in order to solve the problem that electrode can't be revolved owing compact size has been resolved. Coaxial
forced vibration of electrode is benefit for the evacuation of debris, and it helps to achieve stable and efficient
machining. Analysis of harmonic response and the theoretical value of amplitude have been carried out. The optimal
design of ultrasonic motor has been implemented using animate function of ANSYS and optimal design means, and the
interference between teeth of stator has been avoided. Auto-frequency tracking has been completed, and electrode lateral
vibration of electrode has been eliminated. Finally, the holes with figures of Φ85μm circle, Y have been machined.
In order to machine inclined micro-holes and operate in narrow space, a novel miniaturized EDM (Electro Discharge Machining) mechanism has been developed. Because of its merit of compact size (70×40×50mm), the mechanism can be fixed on robot. The prototype of miniaturized EDM system consists of electrode direct drive unit, EDM electrical parameters and servo controller, ultrasonic EDM generator, manual robot, in addition to miniaturized EDM mechanism. Differential Reciprocating Driving Method (DRDM) is presented, and the coaxial forced vibration of electrode can be achieved. Coaxial vibration is applied to promote the evacuation of debris, and it helps to achieve stable and efficient machining. The optimal design of ultrasonic motor has been implemented using Finite Element Method (FEM), and the reasonable structure has been achieved. Feeding resolution of electrode can reach 40nm in differential reciprocating style. The holes with figures of Φ85μm circle, Φ90μm inclined circle, Y and inclined Y have been machined.