Prof. Ya-Chieh Lai
at Cadence Design Systems Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (34)

Proceedings Article | 23 March 2020
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Oxides, Data modeling, Calibration, Metals, Copper, Performance modeling, Systems modeling, Process modeling, Chemical mechanical planarization, Back end of line

Proceedings Article | 23 March 2020
Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV
KEYWORDS: Metals, Silicon, Manufacturing, Reliability, Design for manufacturing, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, Yield improvement, Chemical mechanical planarization

Proceedings Article | 4 April 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

Proceedings Article | 20 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Convolutional neural networks, Metals, Neural networks, Design for manufacturing, Machine learning, Semiconductor manufacturing, Artificial intelligence, Charge-coupled devices, Convolution, Model-based design

Proceedings Article | 18 March 2019
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Silicon, Inspection, Diagnostics, Feature extraction, Machine learning, High volume manufacturing, Failure analysis

Showing 5 of 34 publications
Conference Committee Involvement (4)
Design-Technology Co-optimization XV
21 February 2021 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XIV
26 February 2020 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XIII
27 February 2019 | San Jose, California, United States
Design-Process-Technology Co-optimization for Manufacturability XII
28 February 2018 | San Jose, California, United States
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