Dr. Yalin Xiong
Vice President/Engineering at KLA Corp
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 29 September 2010 Paper
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Lithography, Reticles, Data modeling, Modulation, Polarization, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Defect inspection

Proceedings Article | 8 June 2010 Paper
Proc. SPIE. 7748, Photomask and Next-Generation Lithography Mask Technology XVII
KEYWORDS: Reticles, Logic, Defect detection, Image segmentation, Inspection, Image resolution, Image transmission, Extreme ultraviolet, EUV optics, Defect inspection

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Lithography, Reticles, Defect detection, Inspection, Image resolution, Printing, Wafer inspection, Photomasks, SRAF, Semiconducting wafers

Proceedings Article | 17 October 2008 Paper
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Lithography, Reticles, Defect detection, Scanners, Inspection, Image restoration, Printing, Wafer inspection, Photomasks, Semiconducting wafers

Proceedings Article | 19 May 2008 Paper
Proc. SPIE. 7028, Photomask and Next-Generation Lithography Mask Technology XV
KEYWORDS: Lithography, Reticles, Defect detection, Scanners, Inspection, Image restoration, Printing, Wafer inspection, Photomasks, Semiconducting wafers

Showing 5 of 9 publications
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