Yan A. Borodovsky
Intel Senior Fellow (Retired)
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 3 April 2010
Proc. SPIE. 7641, Design for Manufacturability through Design-Process Integration IV
KEYWORDS: Lithography, Optical lithography, Cadmium, Metals, Glasses, Design for manufacturing, Photomasks, SRAF, Semiconducting wafers, Phase shifts

Proceedings Article | 31 March 2010
Proc. SPIE. 7639, Advances in Resist Materials and Processing Technology XXVII
KEYWORDS: Lithography, Diffraction, MATLAB, Optical lithography, Image processing, Optical engineering, Photoresist processing, Semiconducting wafers, Systems modeling, Floods

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Near ultraviolet, Optical lithography, Molecules, Manufacturing, Xenon, Absorbance, Semiconducting wafers, 193nm lithography, Absorption

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Optical lithography, Imaging systems, Glasses, Near field, Projection systems, Image transmission, Photomasks, Mask making, Semiconducting wafers, Resolution enhancement technologies

Proceedings Article | 7 March 2008
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Optical lithography, Cadmium, Modulation, Etching, Glasses, Image transmission, Photomasks, SRAF, Semiconducting wafers, Phase shifts

Showing 5 of 14 publications
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